1、 Overview

The stainless steel silane combustion tower produced by our company is mainly used for purifying the silane tail gas generated in the production of monocrystalline silicon and polycrystalline silicon industries. The successful application of this equipment is mainly due to the digestion and absorption of silane exhaust gas purification technology by our technical personnel in the foreign semiconductor industry, in order to meet the purification of silane gas generated in the domestic solar energy, light energy industry, semiconductor industry, and CVD chemical gas deposition process.

2、 Working principle

According to the characteristics of spontaneous combustion of silane tail gas in contact with air, the silane tail gas generated in the production process enters the YZR stainless steel silane combustion cylinder through the pipeline for combustion treatment, and the tail gas treated by the combustion cylinder enters the YZR stainless steel silane combustion tower through the pipeline for secondary combustion treatment. The gas after combustion treatment enters the spray chamber of the combustion tower for primary spray treatment and then passes through the packing layer to enter the secondary spray treatment, so that the tail gas can fully reverse contact reaction with the neutralizing circulating liquid, and then is discharged by the exhaust fan after the dehydration treatment.

3、 Product appearance

4、 Process diagram